ONTO INNOVATION INC. (ONTO)
SEC filings, insider trading & institutional ownership from EDGAR.
Onto Innovation is a worldwide designer, developer, manufacturer and supporter of metrology and inspection tools for the semiconductor industry. Its process control tools perform optical metrology and inspection on patterned and unpatterned wafers, including 2D and 3D macro defect inspection. The company also supplies wafer and panel substrate lithography systems and process control analytical software. Its core focus is measuring and controlling the structure, composition and geometry of semiconductor devices as they are fabricated, in order to improve device performance and manufacturing yields. In the fourth quarter of 2025 it acquired Semilab USA, adding the FAaST, CnCV and MBIR product lines for inline wafer contamination monitoring, materials characterization and surface charge metrology.
Products are offered as standalone systems for front-end manufacturing (bare silicon wafer production and wafer processing) and back-end manufacturing (advanced packaging and test). The Atlas family provides automated optical critical dimension (OCD), thin film and wafer stress metrology, supported by AI Diffract and SpectraProbe software and the AiGen X computing engine. The IMPULSE family of integrated metrology systems mounts directly on wafer processing equipment for near real-time measurements and is sold directly to end users. For silicon wafer all-surface inspection, the NovusEdge tool detects backside contamination and edge cracking, and the Element system uses FTIR algorithms for compositional analysis of epitaxial layers. For advanced packaging, the JetStep X500 lithography system processes redistribution layers on panel substrates, and the Firefly series of panel-level macro inspection tools feeds defect data to it through the StepFAST process. The company also offers advanced process control software for standalone tools, groups of tools, and factory-wide and enterprise-wide use, backed by worldwide customer service and applications support.
Customers are primarily silicon wafer manufacturers, semiconductor integrated circuit fabricators and advanced packaging manufacturers. Its tools are also used in specialty device markets including LEDs, VCSELs, MEMS, CMOS image sensors, silicon carbide and gallium nitride power devices, analog devices, RF filters, data storage, and certain industrial and scientific applications. The principal market is semiconductor capital equipment, with chips used in consumer electronics, servers and enterprise systems, mobile computing, data storage and embedded automotive and control systems. Demand is driven by advanced node development (3nm and 2nm logic, 3D NAND with more than 700 layers, DRAM), where metrology tools are typically purchased when a customer begins development at a new node and again as capacity expands. Growth in AI applications is generating demand in both advanced nodes and advanced packaging. Advanced packaging revenue is generally driven by assembly volumes, and the company notes a transition from 300mm wafers toward large rectangular panels of up to 650mm x 650mm.
The company says its expertise in optics and software, together with its research and development investment, underpins its product development. The captured text does not describe its suppliers, manufacturing facilities, competitors or headquarters.
AI-summarized from Item 1 (Business) of the company’s most recent 10-K filing.
Financials
As reported to the SEC via XBRL, no adjustments
| Gross profit | $499.77M |
| Operating income | $132.93M |
| Diluted EPS | $2.78 |
| Gross margin | 49.7% |
| Net margin | 13.6% |
Latest filings
10-K, 10-Q, 8-K, Form 4 & 13D/G. Sourced directly from SEC EDGAR
| Form | Filed | Accession |
|---|---|---|
| 4MILLER DAVID BRIAN | Oct 1, 2026 | 0001233488-26-000007EDGAR |
| 4ROBERTS BRIAN K | Sep 5, 2026 | 0001259094-26-000007EDGAR |
| 4Chen Shirley | Sep 4, 2026 | 0002074793-26-000008EDGAR |
| 4Lynch Susan D | Aug 25, 2026 | 0001784973-26-000007EDGAR |
| 8-K | Aug 10, 2026 | 0001193125-26-341337EDGAR |
| 10-Q | Aug 6, 2026 | 0001193125-26-338401EDGAR |
| 8-K | Aug 6, 2026 | 0001193125-26-337990EDGAR |
| 4Su May | May 22, 2026 | 0001918546-26-000003EDGAR |
Insider trading
From Form 4 filings
| Insider | Date | Type |
|---|---|---|
| MILLER DAVID BRIAN | Sep 29, 2026 | Sell |
| ROBERTS BRIAN K | Sep 2, 2026 | Tax withholding |
| Chen Shirley | Sep 2, 2026 | Tax withholding |
| Lynch Susan D | Aug 21, 2026 | Sell |
| Kelley Stephen Douglas | May 20, 2026 | Grant / award |
Top holders
13F & 13D/G • latest quarter
| Holder | Stake | Filed | Value |
|---|---|---|---|
| BlackRock, Inc. | 11.2% | Aug 7, 2026 | $2.08B |
| Vanguard Portfolio Management | 5.6% | Aug 13, 2026 | $1.03B |
| Vanguard Capital Management | 4.6% | Aug 13, 2026 | $850.66M |
| STATE STREET CORPORATION | 3.2% | Sep 22, 2026 | $588.13M |
| Invesco Ltd. | 2.8% | Aug 14, 2026 | $511.62M |
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Peers identified from ONTO's own SEC filings.
Data as of Nov 8, 2026Source: SEC EDGAR.