ONTO INNOVATION INC. (ONTO)
SEC filings, insider trading & institutional ownership from EDGAR.
Onto Innovation is a global supplier of metrology, inspection, lithography, and process control solutions for the semiconductor and adjacent specialty device industries, serving silicon wafer manufacturers, integrated circuit (IC) fabricators, and advanced packaging manufacturers. Its product portfolio includes automated and integrated metrology systems (such as the Atlas and IMPULSE families) for optical critical dimension (OCD), thin film, and wafer stress metrology; macro defect inspection systems for both 2D and 3D wafer features (including NovusEdge and Firefly product lines); wafer and panel substrate lithography systems (such as JetStep X500); compositional analysis tools (such as Element, using FTIR); and advanced process control analytical software (including AI Diffract, SpectraProbe, and the Ai Gen X computing engine) that support standalone tools, tool groups, and factory- and enterprise-wide operations. Following the fourth-quarter 2025 acquisition of Semilab USA from Semilab International Zrt., the company also added the FAaST, CnCV, and MBIR product lines, expanding its capabilities in inline wafer contamination monitoring, materials characterization, and surface charge metrology.
Onto Innovation’s systems support both front-end wafer processing (e.g., photolithography, diffusion, etch, chemical mechanical planarization, and outgoing quality control) and back-end advanced packaging and assembly processes (e.g., probing, bumping, dicing, through-silicon via and copper pillar formation), addressing customer needs across advanced node semiconductor manufacturing (including logic and memory devices at 3nm/2nm and below) as well as advanced packaging technologies such as 3D integration, heterogeneous integration, and panel-level substrate manufacturing. Beyond core semiconductor IC fabrication, its products are also used in specialty device markets including LEDs, VCSELs, MEMS, CMOS image sensors, silicon and compound semiconductor (SiC and GaN) power devices, analog devices, RF filters, data storage, and certain industrial and scientific applications. The company’s principal market is semiconductor capital equipment, with end customers manufacturing ICs used across consumer electronics, servers and enterprise systems, mobile computing, data storage, and automotive and embedded control systems, and demand for its products is further influenced by growth in artificial intelligence applications driving new requirements in both advanced node and advanced packaging segments.
Onto Innovation’s systems are backed by worldwide customer service and applications support, and its core technological expertise lies in optics, software, and metrology/inspection engineering, which it leverages through ongoing research and development to address evolving industry trends and customer technology roadmaps.
AI-summarized from Item 1 (Business) of the company's most recent 10-K filing.
Financials
As reported to the SEC via XBRL, no adjustments
| Gross profit | $499.77M |
| Operating income | $132.93M |
| Diluted EPS | $2.78 |
| Gross margin | 49.7% |
| Net margin | 13.6% |
Latest filings
10-K, 10-Q, 8-K, Form 4 & 13D/G. Sourced directly from SEC EDGAR
| Form | Filed | Accession |
|---|---|---|
| 4ROBERTS BRIAN K | Sep 5, 2026 | 0001259094-26-000007EDGAR |
| 4Chen Shirley | Sep 4, 2026 | 0002074793-26-000008EDGAR |
| 4Lynch Susan D | Aug 25, 2026 | 0001784973-26-000007EDGAR |
| 8-K | Aug 10, 2026 | 0001193125-26-341337EDGAR |
| 8-K | Aug 6, 2026 | 0001193125-26-337990EDGAR |
| 10-Q | Aug 6, 2026 | 0001193125-26-338401EDGAR |
| 4Su May | May 22, 2026 | 0001918546-26-000003EDGAR |
| 4SEAMS CHRISTOPHER A | May 22, 2026 | 0001212426-26-000003EDGAR |
Insider trading
From Form 4 filings
| Insider | Date | Type |
|---|---|---|
| ROBERTS BRIAN K | Sep 2, 2026 | Tax withholding |
| Chen Shirley | Sep 2, 2026 | Tax withholding |
| Lynch Susan D | Aug 21, 2026 | Sell |
| Kelley Stephen Douglas | May 20, 2026 | Grant / award |
| Lynch Susan D | May 20, 2026 | Grant / award |
Top holders
13F & 13D/G · latest quarter
| Holder | Stake | Filed | Value |
|---|---|---|---|
| BlackRock, Inc. | 11.1% | Aug 7, 2026 | $2.08B |
| Vanguard Portfolio Management | 5.5% | Aug 13, 2026 | $1.03B |
| Vanguard Capital Management | 4.5% | Aug 13, 2026 | $850.66M |
| STATE STREET CORPORATION | 3.1% | Aug 7, 2026 | $588.13M |
| GEODE CAPITAL MANAGEMENT, LLC | 2.9% | Aug 12, 2026 | $542.68M |
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Data as of Sep 15, 2026Source: SEC EDGAR.